Eni generator manual






















Important Notice: Other accessories, manuals, cables, calibration data, software, etc. are not included with this equipment unless listed in the above stock item description. The MKS Instruments / ENI DCG DC Plasma Generator features a front access main circuit breaker, power and fault status LEDs, and a rear eight pin connector. Buying. ENI Products. The drawings, specifications and other technical information contained in this manual are the property of MKS, ENI Products and shall not be copied, reproduced or used in any way, in whole or in part, as the basis of manufacture or sale of similar items . RF Plasma Generator HIGH RF VOLTAGES MAY BE PRESENT AT THE OUTPUT OF THIS specifications and other technical information contained in this manual are the property of ENI and shall not be copied, reproduced or used in any way, in whole or in part, as the basis of manufacture or sale of IN NO EVENT SHALL ENI BE LIABLE FOR SPECIAL, INDIRECT.


MKS Instruments / ENI Genesis Series RF Plasma Generators feature high power density, exceptional stability, generous power margins and excellent reliability. The generator’s ±1% accuracy is tied to and transferable from the United States National Institute of Standards. Response time to power set point changes and process transitions is µS. ENI Products. The drawings, specifications and other technical information contained in this manual are the property of MKS, ENI Products and shall not be copied, reproduced or used in any way, in whole or in part, as the basis of manufacture or sale of similar items without the prior written consent of MKS, ENI Products. generator provides the exceptional reliability and repeatability required for today’s demanding plasma processes. Operating at the frequency of MHz, MHz or MHz, the.


RF Generator ACGB - Max RF Output: W (1KW) - Found on many types of systems, including Branson Systems. - Contact us for all your RF Generator needs! 25 Pin Analog Interface. ™. PROPRIETARY DATA. NOTICE. THIS DRAWING MAY INCLUDE. UNPUBLISHED PROPRIETARY. MATERIAL DEVELOPED BY. MKS, ENI PRODUCTS, AND AS. 17 products MKS RF Power Generators provide reliable solid state power for thin films processing equipment and are vital components of semiconductor.

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